2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE.
Chicago Style (17th ed.) Citation2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE.
MLA (8th ed.) Citation2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE.
Warning: These citations may not always be 100% accurate.