APA (7th ed.) Citation

Griffiths, J. Monitoring and Control of Plasma-Enhanced Processing of Semiconductors. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Griffiths, James. Monitoring and Control of Plasma-Enhanced Processing of Semiconductors. SPIE Digital Library.

MLA (8th ed.) Citation

Griffiths, James. Monitoring and Control of Plasma-Enhanced Processing of Semiconductors. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.