APA (7th ed.) Citation

Lacombat, M. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lacombat, Michel. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.

MLA (8th ed.) Citation

Lacombat, Michel. Optical Microlithography and Metrology for Microcircuit Fabrication. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.