APA (7th ed.) Citation

Brillson, L. Surface and Interface Analysis of Microelectronic Materials Processing and Growth. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Brillson, Leonard. Surface and Interface Analysis of Microelectronic Materials Processing and Growth. SPIE Digital Library.

MLA (8th ed.) Citation

Brillson, Leonard. Surface and Interface Analysis of Microelectronic Materials Processing and Growth. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.