APA (7th ed.) Citation

Ito, H. Advances in Resist Technology and Processing VIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Ito, Hiroshi. Advances in Resist Technology and Processing VIII. SPIE Digital Library.

MLA (8th ed.) Citation

Ito, Hiroshi. Advances in Resist Technology and Processing VIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.