APA (7th ed.) Citation

Wiley, J. 10th Annual Symp on Microlithography. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wiley, Jim. 10th Annual Symp on Microlithography. SPIE Digital Library.

MLA (8th ed.) Citation

Wiley, Jim. 10th Annual Symp on Microlithography. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.