APA (7th ed.) Citation

Ranadive, D. Dry Etch Technology. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Ranadive, Deepak. Dry Etch Technology. SPIE Digital Library.

MLA (8th ed.) Citation

Ranadive, Deepak. Dry Etch Technology. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.