APA (7th ed.) Citation

Hoy Bennett, M. Integrated Circuit Metrology, Inspection, and Process Control VIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control VIII. SPIE Digital Library.

MLA (8th ed.) Citation

Hoy Bennett, Marylyn. Integrated Circuit Metrology, Inspection, and Process Control VIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.