Yoshihara, H. Photomask and X-Ray Mask Technology. SPIE Digital Library.
Cita Chicago (17th ed.)Yoshihara, Hideo. Photomask and X-Ray Mask Technology. SPIE Digital Library.
Cita MLA (8th ed.)Yoshihara, Hideo. Photomask and X-Ray Mask Technology. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.