APA (7th ed.) Citation

Chen, F. Microelectronics Technology and Process Integration. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.

MLA (8th ed.) Citation

Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.