APA (7th ed.) Citation

Yoshihara, H. Photomask and X-Ray Mask Technology II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Yoshihara, Hideo. Photomask and X-Ray Mask Technology II. SPIE Digital Library.

MLA (8th ed.) Citation

Yoshihara, Hideo. Photomask and X-Ray Mask Technology II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.