APA (7th ed.) Citation

Lowell, J. Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lowell, John. Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II. SPIE Digital Library.

MLA (8th ed.) Citation

Lowell, John. Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.