APA (7th ed.) Citation

Fuller, G. Optical Microlithography IX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Fuller, Gene. Optical Microlithography IX. SPIE Digital Library.

MLA (8th ed.) Citation

Fuller, Gene. Optical Microlithography IX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.