APA (7th ed.) Citation

Su, B. Introduction to Metrology Applications in IC Manufacturing. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Su, Bo. Introduction to Metrology Applications in IC Manufacturing. SPIE Digital Library.

MLA (8th ed.) Citation

Su, Bo. Introduction to Metrology Applications in IC Manufacturing. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.