APA (7th ed.) Citation

Zappe, H. MOEMS and Miniaturized Systems XXII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Zappe, Hans. MOEMS and Miniaturized Systems XXII. SPIE Digital Library.

MLA (8th ed.) Citation

Zappe, Hans. MOEMS and Miniaturized Systems XXII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.