APA (7th ed.) Citation

Wood, O. Extreme Ultraviolet (EUV) Lithography VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wood, Obert. Extreme Ultraviolet (EUV) Lithography VI. SPIE Digital Library.

MLA (8th ed.) Citation

Wood, Obert. Extreme Ultraviolet (EUV) Lithography VI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.