APA (7th ed.) Citation

Resnick, D. Alternative Lithographic Technologies VII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Resnick, Douglas. Alternative Lithographic Technologies VII. SPIE Digital Library.

MLA (8th ed.) Citation

Resnick, Douglas. Alternative Lithographic Technologies VII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.