APA (7th ed.) Citation

Cain, J. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.

MLA (8th ed.) Citation

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXIX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.