APA (7th ed.) Citation

Lio, A. Optical and EUV Nanolithography XXXV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lio, Anna. Optical and EUV Nanolithography XXXV. SPIE Digital Library.

MLA (8th ed.) Citation

Lio, Anna. Optical and EUV Nanolithography XXXV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.