APA (7th ed.) Citation

Erdmann, A. Optical and EUV Lithography: A Modeling Perspective. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Erdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE Digital Library.

MLA (8th ed.) Citation

Erdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.