Ando, A. Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Chicago Style (17th ed.) CitationAndo, Akihiko. Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
MLA (8th ed.) CitationAndo, Akihiko. Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.