APA (7th ed.) Citation

Behringer, U. 35th European Mask and Lithography Conference (EMLC 2019). SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. 35th European Mask and Lithography Conference (EMLC 2019). SPIE Digital Library.

MLA (8th ed.) Citation

Behringer, Uwe. 35th European Mask and Lithography Conference (EMLC 2019). SPIE Digital Library.

Warning: These citations may not always be 100% accurate.