APA (7th ed.) Citation

Ukraintsev, V. Metrology, Inspection, and Process Control for Microlithography XXXIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Ukraintsev, Vladimir. Metrology, Inspection, and Process Control for Microlithography XXXIII. SPIE Digital Library.

MLA (8th ed.) Citation

Ukraintsev, Vladimir. Metrology, Inspection, and Process Control for Microlithography XXXIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.