APA (7th ed.) Citation

Levinson, H. J. Principles of Lithography, Fourth Edition. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography, Fourth Edition. SPIE Digital Library.

MLA (8th ed.) Citation

Levinson, Harry J. Principles of Lithography, Fourth Edition. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.