APA (7th ed.) Citation

Monahan, K. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Monahan, Kevin. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.

MLA (8th ed.) Citation

Monahan, Kevin. Handbook of Critical Dimension Metrology and Process Control: A Critical Review. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.