APA (7th ed.) Citation

Stover, H. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Stover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.

MLA (8th ed.) Citation

Stover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.