APA (7th ed.) Citation

Wagner, A. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.

MLA (8th ed.) Citation

Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.