APA (7th ed.) Citation

Stover, H. Optical Microlithography IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Stover, Harry. Optical Microlithography IV. SPIE Digital Library.

MLA (8th ed.) Citation

Stover, Harry. Optical Microlithography IV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.