APA (7th ed.) Citation

Blais, P. Electron-Beam, X-Ray, and Ion-Beam Lithographies VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Blais, Phillip. Electron-Beam, X-Ray, and Ion-Beam Lithographies VI. SPIE Digital Library.

MLA (8th ed.) Citation

Blais, Phillip. Electron-Beam, X-Ray, and Ion-Beam Lithographies VI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.