APA (7th ed.) Citation

Batchelder, J. Lasers in Microlithography. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Batchelder, John. Lasers in Microlithography. SPIE Digital Library.

MLA (8th ed.) Citation

Batchelder, John. Lasers in Microlithography. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.