APA (7th ed.) Citation

Cain, J. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

MLA (8th ed.) Citation

Cain, Jason. Metrology, Inspection, and Process Control for Microlithography XXVIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.