APA (7th ed.) Citation

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

MLA (8th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.