APA (7th ed.) Citation

Faure, T. Photomask Technology 2013. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Faure, Thomas. Photomask Technology 2013. SPIE Digital Library.

MLA (8th ed.) Citation

Faure, Thomas. Photomask Technology 2013. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.