APA (7th ed.) Citation

Herr, D. Alternative Lithographic Technologies III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Herr, Daniel. Alternative Lithographic Technologies III. SPIE Digital Library.

MLA (8th ed.) Citation

Herr, Daniel. Alternative Lithographic Technologies III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.