APA (7th ed.) Citation

Allen, R. Advances in Resist Materials and Processing Technology XXVIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allen, Robert. Advances in Resist Materials and Processing Technology XXVIII. SPIE Digital Library.

MLA (8th ed.) Citation

Allen, Robert. Advances in Resist Materials and Processing Technology XXVIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.