Postek, M. Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. SPIE Digital Library.
Chicago Style (17th ed.) CitationPostek, Michael. Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. SPIE Digital Library.
MLA (8th ed.) CitationPostek, Michael. Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.