APA (7th ed.) Citation

Schenk, H. MOEMS and Miniaturized Systems XI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Schenk, Harald. MOEMS and Miniaturized Systems XI. SPIE Digital Library.

MLA (8th ed.) Citation

Schenk, Harald. MOEMS and Miniaturized Systems XI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.