APA (7th ed.) Citation

Zhang, Y. Advanced Etch Technology for Nanopatterning. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Zhang, Ying. Advanced Etch Technology for Nanopatterning. SPIE Digital Library.

MLA (8th ed.) Citation

Zhang, Ying. Advanced Etch Technology for Nanopatterning. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.