APA (7th ed.) Citation

Seeger, D. Emerging Lithographic Technologies. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Seeger, David. Emerging Lithographic Technologies. SPIE Digital Library.

MLA (8th ed.) Citation

Seeger, David. Emerging Lithographic Technologies. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.