Aizaki, N. Photomask and X-Ray Mask Technology IV. SPIE Digital Library.
Chicago Style (17th ed.) CitationAizaki, Naoaki. Photomask and X-Ray Mask Technology IV. SPIE Digital Library.
MLA (8th ed.) CitationAizaki, Naoaki. Photomask and X-Ray Mask Technology IV. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.