APA (7th ed.) Citation

DeBusk, D. In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing. SPIE Digital Library.

Chicago Style (17th ed.) Citation

DeBusk, Damon. In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing. SPIE Digital Library.

MLA (8th ed.) Citation

DeBusk, Damon. In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.