APA (7th ed.) Citation

Chang, S. Micromachining and Microfabrication Process Technology III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Chang, Shih-Chia. Micromachining and Microfabrication Process Technology III. SPIE Digital Library.

MLA (8th ed.) Citation

Chang, Shih-Chia. Micromachining and Microfabrication Process Technology III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.