APA (7th ed.) Citation

Friedrich, C. Microlithography and Metrology in Micromachining III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Friedrich, Craig. Microlithography and Metrology in Micromachining III. SPIE Digital Library.

MLA (8th ed.) Citation

Friedrich, Craig. Microlithography and Metrology in Micromachining III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.