APA (7th ed.) Citation

Smith, J. Micromachining and Microfabrication Process Technology IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Smith, James. Micromachining and Microfabrication Process Technology IV. SPIE Digital Library.

MLA (8th ed.) Citation

Smith, James. Micromachining and Microfabrication Process Technology IV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.