Motamedi, M. E. Microelectronic Structures and MEMS for Optical Processing IV. SPIE Digital Library.
Chicago Style (17th ed.) CitationMotamedi, M. Edward. Microelectronic Structures and MEMS for Optical Processing IV. SPIE Digital Library.
MLA (8th ed.) CitationMotamedi, M. Edward. Microelectronic Structures and MEMS for Optical Processing IV. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.