APA (7th ed.) Citation

Payne, F. Education in Microelectronics and MEMS. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Payne, Fred. Education in Microelectronics and MEMS. SPIE Digital Library.

MLA (8th ed.) Citation

Payne, Fred. Education in Microelectronics and MEMS. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.