APA (7th ed.) Citation

Houlihan, F. Advances in Resist Technology and Processing XVII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Houlihan, Francis. Advances in Resist Technology and Processing XVII. SPIE Digital Library.

MLA (8th ed.) Citation

Houlihan, Francis. Advances in Resist Technology and Processing XVII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.