APA (7th ed.) Citation

Harrison, H. Advanced Microelectronic Processing Techniques. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Harrison, Herbert. Advanced Microelectronic Processing Techniques. SPIE Digital Library.

MLA (8th ed.) Citation

Harrison, Herbert. Advanced Microelectronic Processing Techniques. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.