APA (7th ed.) Citation

Tobin, K. Metrology-based Control for Micro-Manufacturing. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Tobin, Kenneth. Metrology-based Control for Micro-Manufacturing. SPIE Digital Library.

MLA (8th ed.) Citation

Tobin, Kenneth. Metrology-based Control for Micro-Manufacturing. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.