APA (7th ed.) Citation

Fallon, M. Process and Equipment Control in Microelectronic Manufacturing II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Fallon, Martin. Process and Equipment Control in Microelectronic Manufacturing II. SPIE Digital Library.

MLA (8th ed.) Citation

Fallon, Martin. Process and Equipment Control in Microelectronic Manufacturing II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.